SKM 2023 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 12: Poster

DS 12.53: Poster

Mittwoch, 29. März 2023, 17:00–19:00, P3

Preparation and characterization of Zn1-xMgxO thin films obtained by the aerosol deposition method for UV radiation detector — •Vadim Morari — Techical University of Moldova, D. Ghitu Institute of Electronic Engineering and Nanotechnologies, Chisinau, Republic of Moldova

Zn1-xMgxO ternary oxide solutions with wide band gap were prepared by the aerosol spray deposition method [1] using zinc acetate and magnesium acetate as precursors. This technique offers the possibility of rapid deposition of homogeneous thin films with good electrical and optical properties. It is suitable for growing high-quality thin films on Si, quartz, glass or sapphire substrate, with relatively large areas at low cost due to vacuum-free equipment, low temperatures during deposition, low defect density and low environmental impact. The obtained thin films were characterized by scanning electron microscopy (SEM), energy dispersive X-Ray analysis (EDX), X-Ray Diffraction (XRD), Raman spectroscopy and optical absorption spectroscopy. The investigation of photosensitivity revealed that multilayer ZnMgO structures with different Mg content are more sensitive than single-layer films in a wide spectral range from visible to the ultraviolet (UV-C) radiation.

[1] Morari,V., et. All. Photosensivity of heterostructures produced by aerosol deposition of ZnMgO thin films on Si substrates. In: Proceedings of SPIE - The International Society for Optical Engineering, vol. 11718, p. 1171818:1*8, (2020). https://doi.org/10.1117/12.2571189.