SKM 2023 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 13: Optical Analysis of Thin Films I
DS 13.3: Vortrag
Donnerstag, 30. März 2023, 10:15–10:30, SCH A 316
Developing an open source ellipsometry analysis workflow — •Florian Dobener1, Marius Müller2, Carola Emminger1,3, Chris Sturm3, Tamás Haraszti4, Marius Grundmann3, and Sandor Brockhauser1 — 1Department of Physics, Humboldt-Universität zu Berlin, Germany — 2Institute of Experimental Physics I, Justus-Liebig-University Giessen, Germany — 3Felix-Bloch Institut für Festkörperphysik, Universität Leipzig, Germany — 4DWI Leibniz Institute for Interactive Materials, Aachen, Germany
Optical and geometric characteristics of multilayer material stacks are not accessible from ellipsometric data in a direct way. The optical model applied to the data is the key, which allows understanding of these properties. Accordingly, there exist a lot of different software tools to construct such models, which vary in their model implementation and are often closed source. Comparing, reproducing and using data from literature can therefore be challenging. Here, we present the open source ellipsometry software pyElli. It implements specific dispersion models from manufacturers and from literature. Furthermore, it allows for easy construction of non-standard measurement tasks, e.g. combining different measurements or using uncommon measurement parameters. Together with the recent NeXus ellipsometry standard, the NOMAD research data management platform and its interactive Jupyter based toolkit, we show how pyElli contributes to an open ellipsometry workflow. This open workflow is a standardised and reproducible way of analysing ellipsometry data and adds to the goal of making ellipsometry data FAIR.