SKM 2023 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 14: Thin Oxides and Oxide Layers

DS 14.4: Vortrag

Donnerstag, 30. März 2023, 10:15–10:30, SCH A 315

Transfer and Thermal Processing of Freestanding Oxide Membranes — •Yu-Jung Wu, Varun Harbola, Sander Smink, Sarah C. Parks, and Jochen Mannhart — Max Planck Institute for Solid State Research, Heisenbergstraße 1, 70569 Stuttgart, Germany

Epitaxial films of complex oxides have gained interest due to their wide-ranging physical properties, including high-temperature superconductivity, magnetism, ferroelectricity, and multiferroicity. The conventionally grown single-crystalline oxide thin films are usually bound to their substrates, which imposes constraints on their properties and usage. Therefore, growth techniques have recently been developed that enable lifting-off freestanding complex oxide membranes by wet etching of oxide buffer layers. To achieve transfer of large-area oxide films, we have systematically studied growth and transfer of a variety of thin films, grown on aluminate and manganite wet-etchable buffer layers. Various oxide membranes were successfully transferred with good quality and up to 3x 2 mm2 area with minimal cracking. Furthermore, after thermal processing the stack of the transferred membrane on sapphire, the transferred membrane starts dewetting, yielding nanostructures. This work is not only expected to enable a wide range of oxide films to be transferred in high quality for fundamental studies and applications in oxide electronic devices but also serves as a starting point for crystalline nano-structuring of oxide materials.