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DS: Fachverband Dünne Schichten
DS 8: Thin Film Properties III
DS 8.4: Talk
Tuesday, March 28, 2023, 12:15–12:30, SCH A 315
Rutile CuTiO2 alloy thin films: lowered growth temperature and retained optical properties. — •Hao Lu1,2, Martin Becker1,2, and Peter J. Klar1,2 — 1Institute of Experimental Physics I, Justus-Liebig-University, Giessen, Germany — 2Center for Materials Research (ZfM), Justus-Liebig-University, Giessen, Germany
Titanium dioxide(TiO2) with a rutile structure and suitable bandgap may be advantageously employed as buffer layer and anti-reflection layer in VO2-based smart windows coated on float glass by sputter deposition. The phase transition of the thermodynamically metastable phases, anatase and brookite, into the stable rutile phase occurs in pristine TiO2 at temperatures about 600∘C, which is higher than the melting point of float glass. Hence, we need to significantly reduce the growth temperature of rutile TiO2 in order to deposit it as the film on float glass substrates.
Cu doping has been reported as a means for achieving this goal. We study series of TiO2:Cu thin-film samples deposited on float glass to assess the growth window for rutile TiO2:Cu deposited at temperature below 600∘C. The samples are compared with reference TiO2 thin-films deposited under the same conditions in terms of crystal structure and optical properties.