SKM 2023 – wissenschaftliches Programm

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HL: Fachverband Halbleiterphysik

HL 12: Semiconductor lasers I

HL 12.6: Vortrag

Montag, 27. März 2023, 16:45–17:00, POT 112

Manipulating the emission characteristics of VCSEL in the red spectral range with polymer microlenses and etched surface reliefs — Farnaz Khamseh, •Lena Engel, Michael Zimmer, Sergej Vollmer, Michael Jetter, and Peter Michler — Institut für Halbleiteroptik und Funktionelle Grenzflächen, Center for Integrated Quantum Science and Technol- ogy (IQST) and SCoPE, Universität Stuttgart, Allmandring 3, 70569 Stuttgart

Vertical-cavity surface-emitting lasers (VCSELs) are promising candidates for various applications like sensing, printing and data transfer due to their low power consumption and the possibility of arranging them in arrays. Especially in the red spectral range around 660nm VCSEL are interesting for example in biomedical applications. However, their implementation is often hampered as light is emitted under an angle of divergence of 10° for single mode operation and higher order transverse modes are emitted especially for higher output power operation, further increasing the divergence and limiting the fiber coupling efficiency. Thus, the aim of this work is to improve the emission characteristics of red emitting VCSELs. Therefore, polymer microlenses for beam collimation are integrated directly on the VCSEL surface. Their ideal geometry and the tolerances for the alignment relative to the oxide aperture are thoroughly investigated utilizing ray-optics simulations. Additionally, etched surface reliefs are used to suppress the emission of higher order modes via a spatial modulation of the top mirror loss.