SKM 2023 – scientific programme

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HL: Fachverband Halbleiterphysik

HL 14: 2D Materials III (joint session HL/CPP)

HL 14.10: Talk

Tuesday, March 28, 2023, 12:00–12:15, POT 81

Microwave plasma driven 2H-1T phase modulation of WSe2 for improving NO2 gas sensing performance — •Yu Duan^1,2, Sam Zhang², Huaping Zhao¹, and Yong Lei¹ — ¹Fachgebiet Angewandte Nanophysik, Institut für Physik & IMN MacroNano, Technische Universität Ilmenau, 98693 Ilmenau, Germany — ²Center for Advanced Thin Films and Devices, School of Materials and Energy, Southwest University, Chongqing, 400715, China

Transition metal dichalcogenides (TMDs) have been widely used in recent years for gas sensors. Herein, we constructed a simple microwave plasma device by modifying a home microwave oven for surface treatment of WSe2. A 1T/2H hybrid phase structure was constructed by phase modulation and Se vacancies were introduced to effectively enhance its gas sensing performance. The sample after 60 s of treatment exhibited high response (52.24%), fast response rate (49.8 s), short recovery time (14.9 mins), and outstanding stability and selectivity for 1 ppm NO2 at room temperature. In addition, molecular model of the microwave plasma-treated sample is proposed, leading to the intrinsic mechanism of its performance enhancement. It is demonstrated that microwave plasma treatment is a promising method to enhance the gas sensing performance of TMDs.