SKM 2023 – wissenschaftliches Programm

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HL: Fachverband Halbleiterphysik

HL 33: Poster II

HL 33.49: Poster

Mittwoch, 29. März 2023, 17:00–19:00, P1

Design and optimization of Monolithic High Contrast Grating for tuneable quantum dot VCSEL arrays — •Floriana Laudani¹, Mikołaj Janczak², Bartosz Kamiński³, Niels Heermeier¹, Anna Musiał³, Grzegorz Sek³, Tomasz Czyszanowski², Sven Rodt¹, and Stephan Reitzenstein¹ — ¹Institute of Solid State Physics, Technische Universität Berlin, 10623 Berlin, Germany — ²Institute of Physics, Lodz University of Technology, 90-924 Łódź, Poland — ³Department of Experimental Physics, Wroclaw University of Science and Technology, 50-370 Wrocław, Poland

Water vapor measurements are essential for industrial applications to ensure a qualitative processing and control chain and require gas sensors with short response times in a broad wavelength range. In contrast to standard vertical-cavity surface-emitting lasers (VCSELs), devices with monolithically integrated high contrast gratings (MHCGs) can provide a high flexibility with respect to the emission wavelength. We compare reflectivity measurements and theoretical results on GaAs-based MHCGs for a target wavelength around 940 nm. A numerical model based on Plane-Wave Admittance Method solving set of Maxwell equations was used to search for optimal geometric parameters for effective device optimization, allowing a controlled parameter tuning throughout the fabrication process based on high-resolution electron-beam lithography. Since MHCGs can be custom designed before fabrication, they offer great potential for realizing on-chip tuneable VCSEL arrays, e.g. in a variety of short-range communication systems.