SKM 2023 – wissenschaftliches Programm

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HL: Fachverband Halbleiterphysik

HL 7: Poster I

HL 7.29: Poster

Montag, 27. März 2023, 13:00–15:00, P2/EG

Simulating multi-component target ablation: A new pulsed laser deposition technique — •Arne Jörns, Holger von Wenckstern, and Marius Grundmann — University of Leipzig, Felix Bloch Institute for Solid State Physics, Semiconductor Physics Group

Laterally and radially segmented targets allow the fabrication of functional thin films with lateral and vertical composition spreads, respectively [1]. The latter also enables the creation of material libraries consisting of homogeneous thin films with discrete material composition. However, fabrication of such targets is technically demanding with respect to powder blending, insufficient hardening or thermic decomposition due to deviating sintering temperatures of the source powders for the respective segments.

In this work we present a new target design and deposition technique for pulsed laser deposition in order to create vertical composition spreads as well as discrete composition material libraries but bypassing the above mentioned drawbacks. Simulations for the expected material contents will be presented. Then, experimentally determined elemental distributions and growth rates are compared to calculated values. Electrical and optical properties of samples obtained by such techniques will be reported.

[1] H. von Wenckstern et al.,Phys. Status Solidi 2020, 257, 1900626