SKM 2023 – wissenschaftliches Programm

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HL: Fachverband Halbleiterphysik

HL 7: Poster I

HL 7.54: Poster

Montag, 27. März 2023, 13:00–15:00, P2/EG

Patterned growth of vertical zinc oxide nanowires on sputtered zinc oxide thin films — •Jan Böhmer, Lukas Jäger, Alexander Koch, and Carsten Ronning — Institute of Soild State Physics, Friedrich Schiller University Jena, Max-Wien-Platz 1, 07743 Jena

Because of the wide band of zinc oxide, ZnO nanowires have promising applications in short wavelength optoelectronics, like building photodetectors or laser emitters using nanowire arrays. ZnO nanowires can be easily grown by vapor transport techniques in a high temperature furnace on silicon substrates utilizing the vapor-solid-liquid (VLS) mechanism. However, the nanowires produced in this way typically show random orientations and often overlap each other. A pre-deposited thin film of aluminum doped zinc oxide (Al:ZnO or AZO) by RF sputtering on the substrate creates a polycrystalline ZnO surface with a preferred orientation, on which the nanowires can grow epitaxially. The ZnO nanowires grown this way are almost all orientated perpendicular to the substrate surface resulting in vertical/upstanding nanowires. By now pattering the pre-deposited AZO thin films, selective area growth (SAG) of nanowires is possible. In this contribution, we will discuss our growth results and our goal to control the exact position of nanowire growth to create ordered nanowire arrays.