SKM 2023 – wissenschaftliches Programm
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KFM: Fachverband Kristalline Festkörper und deren Mikrostruktur
KFM 7: Focus: High-resolution Lithography and 3D Patterning
KFM 7.3: Vortrag
Mittwoch, 29. März 2023, 09:50–10:10, POT 51
3D direct laser writing of miniature optical apertures with highly absorptive photoresist — •Michael Schmid1,2, Andrea Toulouse2,3, Simon Thiele2,3,4, Simon Mangold1,2, Alois Herkommer2,3, and Harald Giessen1,2 — 14th Physics Institute, University of Stuttgart, Pfaffenwaldring 57, 70569 Stuttgart, Germany — 2Research Center SCoPE, University of Stuttgart, Pfaffenwaldring 57, 70569 Stuttgart, Germany — 3Institute of Applied Optics (ITO), University of Stuttgart, Pfaffenwaldring 9, 70569 Stuttgart, Germany — 4Printoptix GmbH, Johannesstraße 11, 70176 Stuttgart
In recent years, 3D direct laser writing and its possible application developed rapidly. Different complex micro-optical systems have been demonstrated, such as multi-lens objectives. However, it is still challenging to integrate microscopic apertures to these systems. We present a novel approach to create 3D direct laser written apertures using an opaque material suitable for 2-photon lithography. This way, it is possible to integrate microscopic apertures into 3D printed micro-optical systems improving the imaging quality. We demonstrate this potential by combining 3D printed black apertures with singlet lenses made of the commonly used photoresist IP-S. A significant contrast improvement of the imaging is achieved. Furthermore, due to the absorption coefficient, it is possible to create thin lenses with the black material enabling the fabrication of optical lens and aperture in one step.