SKM 2023 – wissenschaftliches Programm

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KFM: Fachverband Kristalline Festkörper und deren Mikrostruktur

KFM 7: Focus: High-resolution Lithography and 3D Patterning

KFM 7.8: Vortrag

Mittwoch, 29. März 2023, 11:55–12:15, POT 51

Dry film resists: A promising material class for micro-/acoustofluidic chip fabrication — •Andreas Winkler — Group "Acoustic Microsystems", IFW Dresden, Helmholtz str. 20, 01069 Dresden, Germany

Dry film resists (DFRs) promise low-cost and greener microfabrication, and can partly replace conventional technologies for microstructure fabrication being associated with high-energy demands and intense use of toxic and climate-active chemicals. Due to their mechanical stability and superior film thickness homogeneity, DFRs also outperform spin-on resists, such as SU-8, as structural materials, especially when high-resoluted two- and three-dimensional architectures are required such as the case in acoustofluidic chip devices. We investigated various dry film resists in the recent years for their suitability in micro-/acoustofluidic applications. While in general their performance was found to be highly promising and also allowed completely new solutions, properties of commercially available DFRs can vary strongly between individual products and even product charges, and literature on - as well as description of - these materials is still scarce. Here, we introduce this relatively young material class and present selected results regarding technically important effects and limitations, optical properties and performance in acoustofluidic cell separation and aerosol generation.