SKM 2023 – wissenschaftliches Programm

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KFM: Fachverband Kristalline Festkörper und deren Mikrostruktur

KFM 8: Diamond and related dielectric materials

KFM 8.4: Vortrag

Mittwoch, 29. März 2023, 15:00–15:20, POT 51

Fabrication and Characterization of Thin Single-Crystal Diamond Membranes for Quantum Photonics — •Julia Heupel¹, Maximillian Pallmann², Johann P. Reithmaier¹, David Hunger², and Cyril Popov¹ — ¹Institute of Nanostructure Technologies and Analytics (INA), University of Kassel, Heinrich-Plett-Str. 40, 34132 Kassel, Germany — ²Physikalisches Institut, Karlsruher Institute für Technologie (KIT), Wolfgang-Gaede-Str.1, 76131 Karlsruhe, Germany

Due to its exceptional physical and chemical characteristics, single-crystal diamond (SCD) in a form of thin membranes is a promising material for the fabrication of high-quality photonic devices and for envisioned applications in quantum information technologies (QIT). In order to structure SCD membranes with a good quality and thickness of few micrometer or below, it is important to minimize defects originating from polishing (e.g., grooves and pits) or etching procedures (e.g., micro-masking effect). Here we report on the fabrication of thin SCD membranes, exhibiting a low surface roughness down to 0.2 nm by means of inductively coupled plasma reactive ion etching (ICP-RIE). A significant roughness reduction was achieved by using distinct Ar/Cl2 etching recipes as a planarization step before the actual structuring process. These planarized SCD membranes are successfully bonded via van der Waals forces on plane cavity mirrors and optically characterized in a fiber-based Fabry*Pérot microcavity regarding their mode structure and finesse.