SKM 2023 – wissenschaftliches Programm
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MA: Fachverband Magnetismus
MA 23: Poster Magnetism I
MA 23.60: Poster
Dienstag, 28. März 2023, 17:00–19:00, P1
Atomic Layer Deposition of Yttrium Iron Garnet (YIG) for 3D Spintronics — •Michaela Lammel1,2,3, Daniel Scheffler4, Darius Pohl5, Peter Swekis4,6, Sven Reitzig2, Helena Reichlova3,4, Richard Schlitz4, Kevin Geishendorf1,2, Luise Siegl2,4, Bernd Rellinghaus5, Lukas M. Eng2,7, Kornelius Nielsch1,2,7,8, Sebastian T. B. Goennenwein3,4,7, and Andy Thomas1,4 — 1IFW Dresden — 2Institute of Applied Physics, TU Dresden — 3FB Physik, Universität Konstanz — 4Institut für Festkörper- und Materialphysik, TU Dresden — 5DCN, cfaed, TU Dresden — 6MPI CPfS, Dresden — 7ct.qmat, TU Dresden — 8Institute of Materials Science, TU Dresden
Three-dimensional (3D) magnetic structures have recently gained increasing interest in the field of spintronics, since going beyond planar films is expected to lead to a variety of new phenomena. Routes for the fabrication of 3D magnetic insulators are of key importance in order to separately study the magnetic and the electronic response of a given 3D structure. Here, we demonstrate the fabrication of thin films of the magnetic insulator yttrium iron garnet (Y3Fe5O12, YIG) via atomic layer deposition. To that end we utilize a supercycle approach based on sub-nanometer thin layers of the binary systems Fe2O3 and Y2O3 with the corresponding atomic ratios. We deposit Y2O3/Fe2O3 multilayer stacks on Y3Al5O12 substrates and use a subsequent annealing step to obtain YIG films with a high crystalline quality and magnetic properties comparable to the ones realized via other deposition techniques.