SKM 2023 – wissenschaftliches Programm
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MM: Fachverband Metall- und Materialphysik
MM 23: Poster II
MM 23.21: Poster
Dienstag, 28. März 2023, 18:15–20:00, P2/OG1+2
Tuning porous silicon's pore geometry and its influence on laser-excited guided waves — •Marc Thelen1, Nicolas Bochud2, Manuel Brinker1, Claire Prada3, and Patrick Huber1,4,5 — 1MXP, TUHH, Hamburg, Germany — 2MSME, UPEC, Creteil, France — 3Institut Langevin, ESPCI Paris, Université PSL, CNRS, Paris, France — 4CXNS, DESY, Hamburg, Germany — 5CHyN, UHH, Hamburg, Germany
Nanoporosity in silicon leads to entirely new functionalities of this mainstream semiconductor with a wide range of applications. In a recent study, we investigated the complex mechanics and the influence of the pores' conicity [1]. This provided the basis for predictable applications in robust on-chip devices and evidence that recent breakthroughs in laser ultrasound technology open up entirely new possibilities for non-destructive in-situ mechanical characterization of dry and liquid-functionalized porous materials. The pores' conicity, which is unintentionally generated during the electrochemical synthesis of porous silicon, can be actively influenced by the process parameters and, within certain limits, arbitrary pore profiles can be generated. This is used, for example, in the production of Bragg mirrors. By tuning the pore shape, we are now investigating its influence on guided waves further, with the goal of developing a phononic material.
[1] Thelen, M., Bochud, N. et al., Nat Commun., 12, 3597 (2021)