SKM 2023 – wissenschaftliches Programm
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O: Fachverband Oberflächenphysik
O 11: Surface Reactions
O 11.7: Vortrag
Montag, 27. März 2023, 16:30–16:45, CHE 91
Cold plasma deoxidation of copper and iron surfaces — •Viktor Udachin1, Sebastian Dahle2, and Wolfgang Maus-Friedrichs1 — 1Clausthal University of Technology, Clausthal-Zellerfeld, Germany — 2University of Ljubljana, Ljubljana, Slovenia
The removal of native oxides, which are present on metals in ambient atmosphere, is an important step in many industrial applications. Cold plasma methods, like dielectric barrier discharge (DBD) plasmas, have gained attention due to the high deoxidation efficiencies and relative simplicity of the setups. Several groups have indicated a reduction of copper oxygen layers using DBD hydrogen-containing plasmas, but no detailed information about reduction kinetics and limitations on different metal systems is available. In this study, we investigated the deoxidation effect of a DBD plasma in Ar/H2 and Ar/SiH4 atmospheres on natively oxidized Cu and Fe surfaces at 1000 hPa. We observed deoxidation effect on Cu already at 25 ∘C in both atmospheres. In contrast, reduction of iron oxide was obtained only at the surface temperature of 200 ∘C, showing an increase in the efficiency of the plasma-induced thermal treatment in comparison to thermal one. The chemical state of the samples and the kinetics of the reduction of oxides were studied via X-ray photoelectron spectroscopy (XPS). The morphology was characterized with the atomic force microscopy (AFM). By using optical emission spectroscopy (OES), the reactive species within the implemented DBD plasmas were described. Funded by the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) - Project-ID 394563137 - SFB 1368