SKM 2023 – wissenschaftliches Programm

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O: Fachverband Oberflächenphysik

O 12: Scanning Probe Techniques: Method Development I

O 12.1: Vortrag

Montag, 27. März 2023, 15:00–15:15, GER 37

Performance boundaries of piezoelectric friction-inertia walkers due to the choice of contact materials — •Felix Huber, Susanne Baumann, and Sebastian Loth — University of Stuttgart, Institute for Functional Matter and Quantum Technologies, Stuttgart, Germany

High precision positioners are an important tool to realize and automate cutting edge experiments. Piezoelectric friction-inertia walkers enable high accuracy movement on the millimeter scale with nanometer resolution, which makes them essential to realize scanning probe microscopes. The working principle of these nanopositioners makes use of the friction-inertia principle [1]. Therefore, the choice of materials for the contact surfaces defines the performance limits and the reproducibility of stepwise motion. We use optical interferometry to determine the key performance parameters of a linear piezoelectric friction-inertia walker and test combinations of metallic and ceramic contact surface materials to improve the capabilities and reliability of high precision positioner devices.

[1] Z.M. Zhang et al. (2012) Int J Adv Manuf Technol 62, 669-685