SKM 2023 – wissenschaftliches Programm

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O: Fachverband Oberflächenphysik

O 5: Focus Session: Ion Beam Interaction with Surfaces and 2D Materials I

O 5.4: Topical Talk

Montag, 27. März 2023, 11:30–12:00, GER 38

A contactless single-step process for simultaneous nanoscale patterning and cleaning of large-area graphene — •Tuan Tran — Department of Physics and Astronomy, Uppsala University, Sweden

In this talk, we will present a contactless single-step process for structuring self-supporting graphene with customizable patterns and over large areas. Using energetic ions passing through a suspended mask with through-hole nanopatterns, we can deterministically structure the graphene with a minimum feature size down to 15 nm, comparable to what can be achieved with focused ion beam techniques. Our process, however, instead uses a broad parallel beam with no stringent requirement on the beam focusing, and hence enables a contactless approach. Neither, any chemicals and coating layers are necessary, substantially reducing the amount of contamination which might otherwise occur using other lithographic methods. In addition to the structuring capability, we found that the method can simultaneously render the graphene cleaner. The areas surrounding the direct ion impacts are significantly cleaned from the initial contamination which commonly are remnants from the transferring process of the graphene. We will explain the mechanism leading to such cleaning effect. Finally, selective area electron diffraction were used for detailed characterization of the graphene lattice after ion irradiation with and without the mask at different doses and temperatures. These diffraction data are necessary for understanding the creation and annihilation of defects and the possible role of the contamination on self-healing and stabilization of the graphene lattice.