SKM 2023 – wissenschaftliches Programm
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VA: Fachverband Vakuumphysik und Vakuumtechnik
VA 1: Vacuum Technology: New Developments and Applications
VA 1.4: Vortrag
Montag, 27. März 2023, 11:00–11:30, HSZ 301
Novel Ionization Vacuum Gauge Suitable as Reference Standard — •Matthias Bernien1, Frédéric Boineau2, Nenad Bundaleski3, Claus Illgen1, Berthold Jenninger4, Janez Šetina5, Ricardo A.S. Silva3, Anke Stöltzel4, Orlando M.N.D. Teodoro3, Martin Wüest6, and Karl Jousten1 — 1PTB, Abbestr. 2-12, 10587 Berlin, Germany — 2LNE, 1 rue Gaston Boissier, 75724 Paris Cedex 15, France — 3CEFITEC, Nova University of Lisbon 2829-515 Caparica, Portugal — 4CERN, 1211 Geneva 23 Switzerland — 5IMT, Lepi pot 11, 1000 Ljubljana, Slovenia — 6INFICON AG, Alte Landstrasse 6, LI-9496 Balzers, Liechtenstein
Within the EURAMET project 16NRM05 (www.ptb.de/empir/16nrm05-home.html) a new type of ionization vacuum gauge was developed for the pressure range from 10−6 Pa to 10−2 Pa. Unlike conventional Bayard-Alpert and extractor gauges, the new gauge features well-defined electron trajectories and mechanically robust electrodes. It exhibits excellent stability and linearity resulting in a measurement uncertainty of 1%, a reduction by one order of magnitude compared to the conventional gauges. The gauge revealed excellent metrological properties and is suitable as accurate reference and transfer standard.
At the moment the ISO standard 6737 is written standardizing the essential parameters of the gauge geometry and electrode voltages. By adhering to the standard manufactures can produce gauges with predictable gauge sensitivity and relative gas sensitivity factors without the need of characterizing them metrologically.