SKM 2023 – wissenschaftliches Programm

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VA: Fachverband Vakuumphysik und Vakuumtechnik

VA 2: Vacuum Technology: New Developments and Applications – Poster

VA 2.1: Poster

Montag, 27. März 2023, 14:00–16:00, P2/OG2

A Novel Multilayer Barrier Coatings For Improved Cold-Field Electron Emitters — •Daniel Burda — Institute of Scientific Instruments of the CAS, v. v. i., Královopolská 147, 612 64 Brno, Czech Republic

By fabricating ultrathin, hard multilayer barrier coatings on top of the cold-field tungsten emitter, the parameters of the electron emission can be tuned. A multilayer structure of semiconducting and dielectric layers, i.e. Al2O3, HfO2, on top of the electropolished tungsten tip is fabricated using Atomic Layer Deposition. The introduction of multilayered barriers enables modification of macroscopically observable electron emission parameters. The optimized material properties of the multilayer structure such as number of layers, thickness of single layers, and crystallinity lead to improvements in the emitted electron beam parameters, mainly in lowering the threshold emission voltage, increasing the spatial and temporal electron beam stability.