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HK: Fachverband Physik der Hadronen und Kerne
HK 34: Instrumentation X
HK 34.3: Talk
Wednesday, March 22, 2023, 16:30–16:45, SCH/A251
Characterisation of irradiated Digital Pixel Test Structures produced in 65 nm TPSCo CMOS process — •Pascal Becht for the ALICE Germany collaboration — Physikalisches Institut Universität Heidelberg
The future upgraded ALICE Inner Tracking System (ITS3) features wafer-scale, ultra-thin and truly cylindrical Monolithic Active Pixel Sensors (MAPS) as its innermost three layers around the beampipe. New sensors for this effort are intended to be produced in 65 nm CMOS technology in order to benefit from the smaller feature size and the larger commercially available wafers.
With the goal of qualifying this technology for the application in MAPS, an extensive R&D programme is ongoing. In view of a new pixel sensor for the ITS3, a Digital Pixel Test Structure (DPTS) has been designed and produced. Multiple of these prototypes are characterized in laboratory measurements and beam test campaigns at DESY and CERN. In order to evaluate the effects of radiation damage, some sensors have been neutron irradiated to different levels ranging from 1013 1 MeV neq cm−2 to 1016 1 MeV neq cm−2. Furthermore, several prototypes have been subject to an X-ray source and thereby received doses up to 100 kGy.
Detection efficiency and position resolution of the DPTS sensors are presented to characterize their performance. The outcome of these studies demonstrates the feasibility of the 65 nm CMOS technology for the application in future MAPS-based detectors.