SMuK 2023 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 1: Low Pressure Plasmas and their Application I
P 1.4: Vortrag
Montag, 20. März 2023, 12:00–12:15, CHE/0089
Experimental validation of a 0-D computational model for characterisation of double inductively coupled plasma — •J. Jenderny1, M. Osca Engelbrecht3, H. Hylla1,2, I. Korolov1, D. Filla1, L. Schücke1,2, C. P. Ridgers3, P. Awakowicz1, and A. R. Gibson2 — 1Chair of Applied Electrodynamics and Plasma Technology, Ruhr-University Bochum, Bochum, Germany — 2Research Group for Biomedical Plasma Technology, Ruhr-University Bochum, Bochum, Germany — 3York Plasma Institute, Department of Physics, University of York, York, UK
A double inductively coupled plasma is studied to be compared to 0-D plasma chemical kinetics simulations. A focus is placed on oxygen-containing gas mixtures due to their ability to produce large fluxes of reactive species such as atomic oxygen and UV photons. Various experimental diagnostic methods are applied. A multipole resonance probe is used to measure electron densities and electron temperatures radially resolved. Tuneable diode laser absorption spectroscopy is used to measure the absorption profile of the transition Ar (1s5 → 2p6) at 772.376 nm to yield gas temperatures. Absolutely calibrated optical emission spectroscopy is used to determine the absolute intensities of different O transitions. These values are compared to those obtained from a 0-D computational model. The model includes electron densities and a collisional radiative treatment of excited states of O. It is then used to provide information on the flux of photons at 130 and 135 nm. This work was funded by DFG project “Plasma inactivation of microbial Biofilms”, project number 424927143.