SMuK 2023 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 11: Poster I

P 11.13: Poster

Mittwoch, 22. März 2023, 14:00–15:30, HSZ EG

Studies of low temperature radio-frequency discharges using a velocity moment analysis — •Tim Bolles, Maximilian Klich, Thomas Mussenbrock, Ralf Peter Brinkmann, and Sebastian Wilczek — Ruhr University Bochum, 44780 Bochum, Germany

Plasmas are complex systems in terms of their physics and chemistry. Thus, a fundamental understanding of the underlying mechanisms is crucial. The solution of the Boltzmann equation (BE) offers insight into the full spatio-temporal dynamics of the plasma. Single particle simulations such as the kinetic particle-in-cell/Monte Carlo collisions scheme (PIC/MCC) are a feasible way to obtain this information. This work aims to generate a fundamental understanding of a low-temperature plasma by the means of an analysis of velocity moments of the electron energy distribution function. By doing so, the particle generation can, for example, be related to plasma heating. Since the PIC/MCC scheme gives a stochastic solution to BE, arbitrary moments can be calculated and interpreted without approximations and truncation. Many considerations stop the analysis after the first moment, known as momentum balance. We, however, include the energy balance equation (i.e., the second moment) in our evaluation. For our work, we run simulations at varied parameters for pressure, background gas and driving frequency. The conservation equations, especially the energy balance equation, then provides insight into energy dissipation mechanisms. Overall, this work establishes the second moment of the BE as valuable diagnostics and contributes to a fundamental understanding.