SMuK 2023 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 11: Poster I
P 11.26: Poster
Mittwoch, 22. März 2023, 14:00–15:30, HSZ EG
Influence of atmospheric microplasma jet treatment on self-organised sub-micrometer surface structures generated by short pulsed laser irradiation — •S. Chur1, L. Kulik1, R. Labenski1, V. Schulz-von der Gathen2, M. Böke2, and J. Golda1 — 1Plasma Interface Physics, Ruhr-University Bochum, D-44801 Bochum, Germany — 2Physics of Reactive Plasmas, Ruhr-University Bochum, D-44801 Bochum, Germany
Catalyst efficiency is strongly dependent on catalytic surface characteristics. Key features are the morphology and chemical composition. The combination of reactive species provided by an atmospheric pressure microplasma jet and energy input by laser irradiation can lead to very effective functionalisation of surfaces.
Self-organising surface structures were generated on copper (Cu) layers deposited through High Power Impuls Magnetron Sputtering (HiPIMS) on silicon wafers via the Pulsed Laser-Induced Dewetting (PLID) effect. The nanoparticles were investigated using a Scanning Electron microscope (SEM). Cu samples were treated simultaneously with the effluent of a micro atmospheric plasma jet (He/O2 admixture) and laser irradiation in a controlled atmosphere. Treated surfaces were investigated using Xray Photon Emission Spectroscopy (XPS).
A trade-off between high atomic oxygen fluxes and nanoparticle formation was found. Preliminary XPS measurements showed that plasma treatment can influence the oxidation state of copper, namely increase the percentage of CuO compared to an untreated surface.
Supported by the SFB 1316 within project B2