SMuK 2023 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 12: Poster II
P 12.2: Poster
Mittwoch, 22. März 2023, 17:30–19:00, HSZ EG
Characterization of the atmospheric plasma source HelixJetS: generation of silicon nanoparticles — •Leonie Mohn, Maren Dworschak, and Jan Benedikt — Institut of Experimental and Applied Physics, Kiel University, Germany
Silicon nanoparticles are of interest in developing new technologies such as next generation solar panels. Low-pressure discharges can produce silicon nanoparticles reliably but the cost effective and modular nature of atmospheric discharges makes them compelling to study. The atmospheric plasma source HelixJetS is analyzed to determine its ability to produce such silicon nanoparticles. The HelixJetS, a scaled down version of the HelixJet, has two electrodes that form a double helix, one of which is driven by RF power. The jet is operated with gas mixtures consisting of He, Ar, H2 and SiH4. To minimize the material deposition, there are two spatially separated gas inlets for He/H2 on the outer diameter and for He/Ar/SiH4 on the jet axis. The flow rates are simulated with Comsol to find those that achieve laminar flow. The Jet is characterized by varying the gas composition and the power deposited into the plasma and analyzing the resulting plasma by means of optical emission spectroscopy. The resulting nanoparticles are analyzed in regards to size, composition and photoluminescence. A Scanning mobility particle sizer is used to obtain the size distributions. FTIR and in situ-FTIR are used to determine the chemical composition of the particles. If the silicon nanoparticles crystallize, they exhibit photoluminescence, which is also qualitatively analyzed.