SMuK 2023 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 17: Complex Plasmas and Dusty Plasmas/Codes and Modeling II

P 17.3: Vortrag

Donnerstag, 23. März 2023, 16:15–16:30, CHE/0089

Characterization of a Pulsed Plasma and Macroparticles in an Industrial Scale ta-C Laser-Arc Coating System — •Mathis Klette¹, Martin Kopte², Wolfgang Fukarek², and Holger Kersten¹ — ¹Kiel University, Germany — ²VTD Vakuumtechnik Dresden GmbH, Germany

Tetrahedral amorphous carbon (ta-C) coatings are commonly used in industry to improve tribological as well as corrosion and wear properties of treated objects. While ta-C can be deposited using various techniques, the Laser-Arc technology allows for a strong temporal and spatial control of the deposition process while providing high deposition rate and enabling up-scaling for industrial applications. A major limiting factor of this technology is the generation of macroparticles and the resulting defects in the coating. In this contribution we present measurements of plasma parameters, neutrals and macroparticles in dependance on arc parameters to get a better understanding of the impact on film growth and system upscaling. The carbon Laser-Arc system produces 100-300 us, 1-3 kA pulses, which are observed with a custom-tailored diagnostic setup. The Langmuir probes, retarding field analyzers, and the optical emission spectroscopy allow for spatially and time resolved measurements of electron and ion energy distribution functions, and estimates of neutral densities. Calorimetric probes monitor the energy influx to the substrate which is of special importance when forming tetrahedral bonds. The temporal and special macroparticle velocity distributions have been investigated with high-speed cameras.