SMuK 2023 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 9: Atmospheric Pressure Plasmas and their Applications III
P 9.3: Vortrag
Mittwoch, 22. März 2023, 11:45–12:00, CHE/0089
Challenges during the design of a DC microplasma cell intended for in situ TEM — •Luka Hansen1, Niklas Kohlmann2, Lorenz Kienle2, and Holger Kersten1 — 1Institute of Experimental and Applied Physics, Kiel University, Kiel, Germany — 2Institute for Material Science, Kiel University, Kiel, Germany
In situ observation of plasma surface modifications are possible if a microplasma is inserted into a TEM as shown by proof of principle experiments in 2013 [1]. Still, multiple challenges have to be overcome for the development of a microplasma cell suitable for TEM integration. The electrodes have to be electron beam transparent and are therefore restricted to tens of nanometers in thickness. The microplasma itself has to be vacuum-proof encapsulated and operated in a stable regime.
A DC microplasma was designed and intensively studied to ensure its stable operation in the normal glow regime [2]. Ex situ performed measurements proved the possibility to setup the electrodes thin enough for TEM imaging and study the surface modifications [3]. Furthermore, the microplasma cell was successfully introduced into the TEM and first images without plasma could be taken. Electrical isolation problems prevented plasma ignition inside of the TEM, but will be solved by rebuilding the vacuum-proof encapsulation from ceramic.
This contribution summarizes the already overcome challenges and updates about the recent steps towards in situ TEM imaging.
[1] K. Tai et al., 2013 Scientific Reports 3 1325
[2] L. Hansen et al., 2022 Plasma Sources Sci. Technol. 31 035013
[3] L. Hansen et al., Thin Solid Films (Accepted)