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P: Fachverband Plasmaphysik

P 9: Atmospheric Pressure Plasmas and their Applications III

P 9.4: Vortrag

Mittwoch, 22. März 2023, 12:00–12:15, CHE/0089

Characterization of Sputtered Polyethylene Naphthalate-Foil for Flexible Surface DBD Plasma Generation — •Sandra Moritz¹, Roman Bergert², Martin Becker¹, and Markus H. Thoma¹ — ¹I. Physikalisches Institut, Justus-Liebig-Universität Gießen, Deutschland — ²II. Physikalisches Institut, Justus-Liebig-Universität Gießen, Deutschland

Plasma medicine demands for very specific plasma source configurations. Beside gasflow-driven jet-arrays, dielectrical barrier discharges (DBD) are commonly used to generate ambient air plasma at room temperature for sterilization. There, electrode and dielectric material limit its use in application. Especially, the sterilization of difficult, uneven or edged surface geometries with DBD can be rather challenging. Therefore, flexible polyethylene naphthalate-foil (PEN-foil) which was covered with electrode material by ion-beam sputtering is characterized regarding its electrical and bactericidal performance for different power and electrode thickness configurations. Operating temperature, ozone production capability and plasma parameters (electron temperature and density) were used as characterization parameters. Advantages as well as limitations of this new approach are presented.