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CPP: Fachverband Chemische Physik und Polymerphysik

CPP 28: Poster III

CPP 28.19: Poster

Mittwoch, 20. März 2024, 11:30–13:30, Poster C

OLED fabrication with a self-designed semi-automated vapor deposition system — •Mona Löther, Ahmed Mohamed, Felix Kübert, Johannes Leser, Vladimir Dyakonov, and Andreas Sperlich — Experimental Physics 6, Julius-Maximilians-Universität Würzburg (JMU), 97074 Würzburg

A common method for producing organic light-emitting diodes (OLEDs) involves physical vapor deposition (PVD) of organic and metallic layers in ultra-high vacuum. We have devised a production process featuring a self-designed semi-automated PVD system with two chambers of similar structure - one for organic PVD and the other for metal PVD - connected by an airlock. Each chamber includes a substrate carrier, stepper motors, crystal oscillators for measuring layer thicknesses, rotary-linear motion feedthroughs, and magnetic sensors for precise substrate placement. The organic chamber houses six crucibles, including two pairs of co-evaporating crucibles, while the metal chamber houses two metal boats. The production steps are as follows: placing cleaned ITO-coated substrates in the first chamber, adjusting a mask, sequentially evaporating organics, transferring the substrate to the second chamber without exposure to ambient air, adjusting a different mask, and evaporating metals. A Python program coordinates essential operations such as temperature control, automated positioning of the substrates above the crucibles and metal boats, control of the evaporated layer thickness through shutter control, and data assimilation. The setup has been successfully tested in the fabrication of blue OLEDs based on ν-DABNA.

Keywords: Organic Light Emitting Diodes; OLED; Physical Vapor Deposition; Evaporation