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CPP: Fachverband Chemische Physik und Polymerphysik
CPP 4: Interfaces and Thin Films
CPP 4.5: Vortrag
Montag, 18. März 2024, 10:30–10:45, H 0111
Investigating the Ag growth on PET foil with dcMS and HiPIMS — •Yusuf Bulut1,2, Benedikt Sochor1, Kristian Reck3, Suzhe Liang2, Zhuijun Xu2, Alexander Meinhardt4,5, Arno Jeromin4, Thomas F. Keller4,5, Andreas Stierle4,5, Thomas Strunskus3, Franz Faupel3, Peter Müller-Buschbaum2,6, and Stephan V. Roth1,7 — 1DESY, 22607 Hamburg — 2TUM School of Natural Sciences, Chair for Functional Materials, 85748 Garching — 3CAU Kiel, Chair for Multicomponent Materials, Faculty of Engineering, 24143 Kiel — 4CXNS, 22607 Hamburg — 5UHH Hamburg, Department of Physics, 22607 Hamburg — 6MLZ, TUM, 85748 Garching — 7KTH, SE-100 44 Stockholm
High Power impulse magnetron sputtering (HIPIMS) is a novel industrially-relevant deposition technique enabling increased adhesion and denser film formation of thin deposited metal layers on polymers. No pre- and post-treatment is required to achieve these properties. So far, no report has discussed the nucleation and growth process during HiPIMS deposition. In this new study, polyethylenterephthalate (PET) foil is studied under various deposition conditions. Results of simultaneous in situ grazing-incidence small angle X-ray scattering (GISAXS), grazing incidence wide-angle X-ray scattering (GIWAXS) and field emission scanning electron microscopy (FESEM) are presented.
Keywords: GISAXS; GIWAXS; FESEM