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DS: Fachverband Dünne Schichten
DS 10: Thin Film Application
DS 10.2: Talk
Wednesday, March 20, 2024, 15:15–15:30, A 060
Functionalization of SiC diodes for soft X-ray optics — •Simone Finizio1, Massimo Camarda2, Joakim Reuteler3, and Jörg Raabe1 — 1Swiss Light Source, Paul Scherrer Institut, Villigen PSI, Switzerland — 2SenSiC GmbH, Villigen PSI, Switzerland — 3ScopeM, ETH Zürich, Zürich, Switzerland
Synchrotron light sources are a vital tool for the scientific community that has allowed for several critical discoveries. Amongst the quiver of techniques offered by synchrotrons, X-ray microscopy and spectroscopy are two of the most popular ones. A critical requirement for such techniques is the reliable and reproducible positioning of the X-ray beam, and the measurement of its intensity, to avoid measurement artefacts that can affect the quality of the acquired data. The integration of X-ray beam position and intensity sensors in measurement conditions as close as possible to those experienced by the sample under investigation is therefore of interest. In this presentation, we will show the fabrication and integration of SiC diode sensors with soft X-ray spectro-microscopy beamlines, in particular with geometries ranging from pinholes, center stops, and thin membrane films.
Keywords: Silicon Carbide; X-ray microscopy; Nanofabrication