Berlin 2024 – scientific programme

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DS: Fachverband Dünne Schichten

DS 11: Poster I (joint session DS/MM/O)

DS 11.13: Poster

Wednesday, March 20, 2024, 17:00–19:00, Poster B

Optical and morphological properties of thin Nb2O5 layers deposited via High Power Impulse Magnetron Sputtering — •Christof Zickenheiner¹, Raul Ramos², Viktor Udachin¹, Wolfgang Maus-Friedrichs¹, and José R.R. Bortoleto² — ¹Clausthal University of Technology, Clausthal-Zellerfeld, Germany — ²Instituto de Ciencia e Tecnologia, Sorocaba, Brazil

To address climate challenges and sustainable development, the UN set ambitious goals. Renewable energy, particularly solar, plays a key role. Emerging technologies like perovskite solar cells (PSC) offer cost-effective production, competing with silicon-based counterparts. This study focuses on the electron transport layer in PSC using Nb2O5 thin films deposited on glass substrates via HiPIMS from an Nb-target in an Ar/O2 atmosphere at 25 ^∘C. Pulse duration and oxygen pressure were varied as experimental parameters. Optical emission spectroscopy (OES) revealed the presence of oxygen species within a plasma and excitation of sputtered metal species for the HiPIMS process. The examination of the morphological properties via profilometry and contact angle analysis showed an influence of the experimental parameters on roughness. That is, shorter pulses as well as lower oxygen pressure result in smoother layer growth with a lower deposition rate. The investigation of optical properties via UV/Vis-Spectroscopy showed no significant impact of pulse duration. It became evident that lower oxygen pressure reduces the incorporation of oxygen into the growing layer. This results in a changed phase composition, with the formation of NbO2, which in turn affects optical and electrical properties.

Keywords: Sputtering; Perovskite Solar Cells; HiPIMS; Nb2O5