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DS: Fachverband Dünne Schichten

DS 11: Poster I (joint session DS/MM/O)

DS 11.14: Poster

Wednesday, March 20, 2024, 17:00–19:00, Poster B

An attempt to predict oligomer sputtering using binary collision approximation simulations — •Hans Hofsäss, Felix Junge, and Patrick Kirscht — II. Physikalisches Institut, Universität Göttingen, Germany

The binary collision approximation (BCA) program IMINTDYN [1] allows a prediction of ion solid interactions. For sputtering of carbon and SiO2 experimental sputter yields are significantly higher than yields from BCA simulations. SDTrimSP simulations [2] reproduce experimental sputter yields by adjusting the surface binding energies. For O atoms 1 eV instead of the elemental sublimation energy of 2.58 eV and for carbon 4.5 eV instead of 7.4 eV is used. For sputtering of carbon it was shown [3] that sputtering of oligomers and clusters is relevant. We introduce a model to simulate oligomer sputtering using the IMINTDYN program based solely on thermodynamic formation enthalpies. In particular sputtering of O2 and SiO dimers and carbon oligomers is energetically favorable. To predict the oligomer sputter fraction, we use Boltzmann factors based on the ratios of oligomer and monomer formation enthalpies. We show that we can quantitatively predict the carbon and SiO2 experimental sputter yields.

[1] H. Hofsäss, A. Stegmaier, Nucl. Instr. Meth B 517 (2022) 49

[2] A. Mutzke, R. Schneider, W. Eckstein, R. Dohmen, K. Schmid, U. von Toussaint, G. Bandelow, SDTrimSP Version 6.00, MPI Plasma Physics, report IPP 2019-02 (2019)

[3] E.Oyarzabal, R.P. Doerner, M. Shimada, G.R. Tynan, J. Appl. Phys. 104 (2008) 043304