Berlin 2024 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 11: Poster I (joint session DS/MM/O)
DS 11.19: Poster
Mittwoch, 20. März 2024, 17:00–19:00, Poster B
Modification of the optical and electrical properties of AZO thin films for variety of applications — •Maria Stefanova1, Dimitrina Petrova1,2, Blagovest Napoleonov1, Stefani Bogoeva1, Vladimira Videva1,3, Velichka Strijkova1, Vera Marinova1, and Dimitre Dimitrov1,4 — 1Institute of Optical Materials and Technologies-BAS Sofia, Bulgaria — 2South-West University "Neofit Rilski", Blagoevgrad, Bulgaria — 3Sofia University, Sofia, Bulgaria — 4Institute of Solid State Physics, Bulgarian Academy of Sciences, Sofia, Bulgaria
Here we report on the deposition of Aluminium Doped Zinc Oxide (AZO) thin films on sapphire substrates (AZO/Sapphire) by using ALD method and the influence of postdeposition UV-Ozone treatment on the films' properties. XRD revealed a polycrystalline wurtzite structure. The influence of UV-Ozone treatment on surface morphology, electrical and optical properties of AZO/Sapphire was investigated. It was found that UV-Ozone treatment improves the electrical and optical properties while did not cause significant changes to the polycrystalline structure and surface morphology of the AZO films which opens potential for various practical applications.
Acknowledgements This work is supported by the Bulgarian National Science Fund under the grant number KP-06-N-68/1 and the Research equipment of distributed research infrastructure INFRAMAT (part of Bulgarian National roadmap for research infrastructures) supported by Bulgarian Ministry of Education and Science.