Berlin 2024 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 20: Poster II

DS 20.19: Poster

Donnerstag, 21. März 2024, 18:00–20:30, Poster D

Low energy ion-solid interactions: a quantitative experimental verification of binary collision approximation simulations — •Hans Hofsäss¹, Felix Junge¹, Patrick Kirscht¹, and Koen van Stiphout² — ¹II. Physikalisches Institut, Universität Göttingen, Germany — ²Department of Physics, KU Leuven, Belgium

Ultra-low energy ion implantation has become an attractive method for doping of 2D materials. The dynamic binary collision approximation Monte Carlo program IMINTDYN [1,2] allows a reliable prediction of low energy implantation profiles and target compositional changes, as well as efficient simulation of high energy light ion scattering. To demonstrate the quality of these simulations, we present implantation of W ions into tetrahedral amorphous carbon with low (10 keV) and ultra-low (20 eV) energies and high resolution Rutherford backscattering spectrometry (HR-RBS) to analyze the W implantation profiles with[1]. The experiment is compared with a complete simulation of all aspects of ion-solid-interactions of the experiment using the IMINTDYN. A unique novel simulation option is the inclusion of the vacancy as target species with dynamic vacancy generation and annihilation. We find excellent agreement between simulated and measured HR-RBS spectra if vacancy formation is included.

[1] H. Hofsäss, F. Junge, P. Kirscht and K. van Stiphout, Material Research Express (2023) DOI 10.1088/2053-1591/ace41c

[2] H. Hofsäss and A. Stegmaier, Nucl. Instr. Meth B 517 (2022) 49-62

Keywords: Ion implantation; ion beam analysis; binary collision approximation; high resolution backscattering