Berlin 2024 – scientific programme
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DS: Fachverband Dünne Schichten
DS 20: Poster II
DS 20.22: Poster
Thursday, March 21, 2024, 18:00–20:30, Poster D
Influence of post-growth temperature treatment on the surface structure of ion-beam sputtered vanadium oxide — •Yan Ravil Wollenweber-Bienerth, Antonia Krieger, Martin Becker, Sangam Chatterjee, and Peter J. Klar — Institute of Experimental Physics I , Heinrich-Buff-Ring 16, Justus-Liebig-Universität Giessen, D-35392 Giessen, Germany
Thermochromic (TC) smart windows are a type of fenestration whose transmittance switches as a function of the ambient temperature. Vanadium dioxide (VO2) is by far the most studied TC material. Its insulator-to-metal transition is correlated with a crystalline phase transition accompanied by the change of transmittance/reflectance in the infrared region. To grow crystalline vanadium oxide thin films, usually high substrate temperatures are necessary. In an industrial process, however, post-growth annealing may be more desirable than in-situ heating during the deposition process. Furthermore, a post-growth temperature treatment may allow for a reduction of the growth temperature. Moreover, not only the material’s phase is crucial, but also the evolution of the surface morphology of the functional layers.
Here, we employ ion-beam sputter deposition (IBSD) for the growth of VOx and investigate different annealing routes for obtaining VO2. We show that there is a temperature dependence of layer thickness and surface morphology of vanadium oxide as well as of its phase transition on annealing atmosphere, annealing pressure and annealing time. Thus, post-growth annealing enables further tuning the material’s properties.
Keywords: vanadium oxide; thermochromism; thin films; post-growth temperature treatment; smart windows