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DS: Fachverband Dünne Schichten

DS 20: Poster II

DS 20.4: Poster

Thursday, March 21, 2024, 18:00–20:30, Poster D

Proton exchange on thin-film lithium niobate — •Maranatha Andalis, Ioannis Caltzidis, Oscar Camacho Ibarra, Hermann Kahle, Tobias Henksmeier, and Klaus D. Jöns — PhoQS Institute, CeOPP, and Department of Physics, Paderborn University, Paderborn

Lithium niobate-on-insulator (LNOI) is an ideal platform for integrated optics due to its strong electro-optical and acousto-optic properties, wide transparency window, and relatively high refractive index. However, the fabrication of low-loss LNOI waveguides, attributed to the redeposition of by-products, remains a challenge today. One way to overcome this challenge is to replace lithium ions with protons, which can reduce the redeposition during dry etching. Although proton exchange has been utilized previously for bulk lithium niobate, studies on its application in thin films are not fully clarified. In this study, an x-cut LNOI was used to investigate proton exchange. The results will provide an overview of the most recent discoveries.

Keywords: proton exchange; thin film lithium niobate; x-cut LNOI