Berlin 2024 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 20: Poster II
DS 20.8: Poster
Donnerstag, 21. März 2024, 18:00–20:30, Poster D
Evaluation of thin Pd layers used in a sensor system for the continuous measurement of high hydrogen concentrations in a fuel cell — •Christopher Bickmann1, Lucas Viriato2, Peter Schwotzer-Uhlig2, Christoph Meinecke1,3, Danny Reuter1,3, Thomas von Unwerth2, and Harald Kuhn1,3 — 1Center for Microtechnologies, University of Technology Chemnitz, Chemnitz 09126, Germany — 2Department of Advanced Powertrains, University of Technology Chemnitz, Chemnitz 09126, Germany — 3Fraunhofer Institute for Electronic Nanosystems (ENAS), Chemnitz 09126, Germany
The focus of this study is to evaluate the potential use of thin palladium layers for integration within a sensor system designed for use in a hydrogen fuel cell and to enable continuous measurement of high hydrogen concentrations. The functional principle is based on an increase in electrical resistance caused by the diffusion of hydrogen atoms into the metal lattice of the palladium. The methodology used involves the production of these thin-film structures using lithographic processes, which include techniques such as lift-off processes and physical vapor deposition. The characterization of the electrical resistance as a function of hydrogen concentration, humidity and temperature is carried out in a specially designed test chamber. It can be shown that the structures enable a continuous and reproducible measurement of the hydrogen concentration, whereby the measuring range is dependent on the layer thickness. An outlook on a sensor prototype is given, which is to be tested under real conditions in the further course.
Keywords: Hydrogen; Thin Film; Palladium; Fuel cell