Berlin 2024 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 3: Layer Properties

DS 3.1: Hauptvortrag

Montag, 18. März 2024, 15:00–15:30, A 053

Advances in AlN-based ternary alloy crystals with regard to their elastic, thermodynamic and piezoelectric properties — •Oliver Ambacher — Institute for Sustainable System Engineering, University Freiburg

The piezoelectric coefficient e33 from wurtzite AlN (wz-AlN), which is particularly interesting for high-frequency acoustic wave filters, can be increased up to 150% by alloying AlN with ScN or YbN. In addition, wz-ScAlN and wz-YbAlN layers show ferroelectric properties and large remanent polarizations up to very high temperatures. The ferroelectric effect enriches the dimension of polarization engineering in group-III-nitride based heterostructures and provides opportunities for the integration of novel functionalities into electronic and piezo acoustic devices. For this reason the piezoelectric, spontaneous, and ferroelectric polarization as wll as the structural, elastic, and thermodynamic properties of hexagonal GaN, ScN, YbN and AlN crystals as well as their ternary alloy will be presented.