Berlin 2024 – wissenschaftliches Programm

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HL: Fachverband Halbleiterphysik

HL 13: Poster I

HL 13.25: Poster

Montag, 18. März 2024, 15:00–18:00, Poster E

Optimisation of the surface structure of a Pt/TiOx sensor for low concentrations of hydrogen — •Anastasija Scherer, Marvin Rauhut, Thomas Heinzel, and Mihai Cerchez — Condensed Matter Physics Laboratory, Heinrich-Heine-Universität Düsseldorf

Mesoporous TiOx based hydrogen sensors are highly sensitive also at ppm concentrations [1], however, the results are highly dependent on the parameters of the TiOx internal structure, like defect density or internal surface-to-volume ratio. The sensors are produced by anodisation of industrial grade Ti foil in solution of sulfuric acid [2]. The process leads to the formation of a TiOx thin layer of thickness of the order of micrometers, and surface aspect varying between sandy and spongeous, with a characteristic mesh size of the order of 100 nm. This is controlled by the voltage used during the anodisation process as well as subsequent thermal annealing. Measurements of the sensing capability will be presented. [1] Appl. Phys. Lett. 103, 033522, 2013 [2] Metals 8, 386, 2018

Keywords: sensors; hydrogen