Berlin 2024 – scientific programme
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HL: Fachverband Halbleiterphysik
HL 13: Poster I
HL 13.45: Poster
Monday, March 18, 2024, 15:00–18:00, Poster E
Ultra-thin subwavelength detection of polymer layers using highly-doped n-Ge plasmonic antenna in the THz range — •Elena Hardt1, Carlos Alvarado Chavarin1, Julia Flesch2, Oliver Skibitzki1, Romualdo Varricchio3, Alessandra di Masi3, and Giovanni Capellini1,3 — 1IHP - Leibniz Institut für innovative Mikroelektronik, Im Technologiepark 25, 15236 Frankfurt (Oder), Germany — 2University of Osnabrueck, Barbarastrasse 11, 49076 Osnabrueck, Germany — 3Department of Sciences, Università Roma Tre, Viale G. Marconi 446, 00156, Roma, Italy
The advatanges of THz instrumentation for biosensing is based on the high sensitivity to polar substances and on very low energy photons of the THz range. Thus, recent improvements in THz sources and detectors allow label-free, reliable measurements of biomolecules. LSPR is an ideal concept to enhance the spectroscopy signal and to improve the sensitivity. In this work, we investigate the sensitivity of highly n-doped Ge plasmonic THz antennas realized on Si and SOI substrates in presence of ultra-thin subwavelength polymer layers. The antenna response to the well-known electrostatic layer-by-layer deposition is investigated by observing the shift of the LSPR in the THz spectra. 5, 15 and 22 layers of poly-(allylamine)PAN/poly-(acrylic acid)PAA show a linear response. By using an optimized antenna design relying on low losses SOI substrates, we detect resonance spectral shifts as large as 14.5 GHz in response to 22 PAN/PAA layers of a few nm-thickness. We believe that this result could pave the way to a low-cost CMOS compatible biosensing platform.
Keywords: THz range; highly doped n-germanium; plasmonic antenna; biosensing