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HL: Fachverband Halbleiterphysik

HL 14: Poster II

HL 14.10: Poster

Monday, March 18, 2024, 15:00–18:00, Poster F

Growth Optimization and fabrication of Site-Controlled InGaAs Quantum Dots in Hexagonal Arrays — •Martin Podhorský, Imad Limame, Kartik Gaur, Maximilian Klonz, Priyabrata Mudi, Sven Rodt, and Stephan Reitzenstein — Institute of Solid State Physics, Technical University of Berlin, Hardenbergstr. 36, D-10623 Berlin, Germany

Optimized site-controlled quantum dots (SCQD) arrays have significant potential for practical applications in fields such as quantum computing and secure communication. This study focuses on the growth and optimization of InGaAs SCQDs within hexagonal arrays, aiming to enhance the precision and reliability of the quantum dot placement for advanced optoelectronic applications. We employ a systematic approach to optimize growth parameters to achieve uniform and reproducible site-controlled growth. The impact of these growth conditions on the structural and optical properties of SCQDs is thoroughly investigated via atomic force microscopy (AFM), scanning electron microscopy (SEM), confocal laser scanning microscopy (CLSM), X-Ray diffraction (XRD) and photoluminescence (PL) spectroscopy.

Keywords: Site-controlled InGaAs quantum dots; Metal organic chemical vapor deposition; Electron beam lithography; Photoluminiscence; Vertical-cavity surface-emitting lasers