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HL: Fachverband Halbleiterphysik
HL 18: 2D Materials and Heterostructures: Emerging Materials and Phenomena
HL 18.11: Talk
Tuesday, March 19, 2024, 12:15–12:30, EW 201
Extended suspension of transition metal dichalcogenide monolayers — •Leonard Geilen1,3, Lukas Schleicher2,3, Eva Weig2,3, and Alexander Holleitner1,3 — 1Walter Schottky Institute, TU Munich, Germany — 2Chair of Nano and Quantum Sensors, TU Munich, Germany — 3Munich Center for Quantum Science and Technology (MCQST), Munich, Germany
Suspended 2D materials offer great possibilities in the realm of investigating the fundamentals of nano- and micromechanical systems as well as chip-based sensors. So far, 2D materials have been suspended on the order of tens of micrometers in the case of few-layer materials and up to ten for monolayers. We demonstrate how a dry-transfer allows fabricating suspended monolayers of transition metal dichalcogenides with diameters larger than ten micrometers and a reduced impact of fabrication residues.
Keywords: TMD; Suspended; Micromechanics; Dry-transfer