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HL: Fachverband Halbleiterphysik

HL 34: Focus Session: Nanomechanical Systems for Classical and Quantum Sensing II (joint session HL/DY/TT/QI)

HL 34.7: Vortrag

Mittwoch, 20. März 2024, 16:45–17:00, EW 202

Probing the Mechanical Loss of Individual Surfaces of a Nanomechanical String Resonator — •Philipp Bredol, Felix David, and Eva Weig — Technical University of Munich, Chair of Nano and Quantum Sensors, 85748 Munich, Germany

Stressed nanostring resonators are a promising platform for sensing applications and quantum technologies because of their small footprint and high mechanical quality factors. In this contribution we show that the dissipation caused by sidewall surfaces and the dissipation caused by bottom and top surfaces can be individually determined from the mechanical response spectrum. This information helps to evaluate and adjust fabrication parameters such as etchant chemistry, etch mask materials and possible annealing steps. Being able to characterize the mechanical loss mechanisms that limit a given device is important for integration with other structures and to further push the performance of nanostring resonators.

Keywords: string resonator; nanomechanics