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HL: Fachverband Halbleiterphysik

HL 37: Poster IV

HL 37.23: Poster

Mittwoch, 20. März 2024, 18:00–20:30, Poster F

Optically pumped micropillar lasers at room temperature for gas sensing around 960 nm — •Floriana Laudani, Sarthak Tripathi, Kartik Gaur, Aris Koulas-Simos, Sven Rodt, and Stephan Reitzenstein — Institute of Solid State Physics, Technische Universität Berlin, 10623 Berlin, Germany

Quantitative water vapor measurements are essential for industrial applications to ensure a qualitative processing and control chain and require gas sensors with short response times and narrow spectral bandwith in a broad wavelength range. In contrast to conventional edge-emitting lasers, compact surface-emitting lasers offer a cost-effective alternative, usable in a variety of gas-sensing systems, with respect to the emission wavelength.

We report on room temperature operation of optically pumped GaAs micropillar lasers with a set of In_0.33Ga_0.67As quantum dot (QDs) layers as active gain medium embedded in an Al_0.2Ga_0.8As/Al_0.9Ga_0.1As distributed Bragg reflector (DBR) microcavity structure, emitting at a target wavelength of around 960 nm. The fabrication process is based on high-resolution electron-beam lithography with subsequent suitable development steps. The micropillars are made by etching in an Inductively Coupled Plasma RIE (ICP-RIE) chamber using a CL₂/BCL₃/Ar atmosphere.

Keywords: micropillar; laser; room temperature; optically pumped; gas sensing