Berlin 2024 – wissenschaftliches Programm

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HL: Fachverband Halbleiterphysik

HL 41: Focus Session: Nanomechanical Systems for Classical and Quantum Sensing III (joint session HL/DY/TT/QI)

HL 41.7: Vortrag

Donnerstag, 21. März 2024, 12:30–12:45, EW 202

3D Microwave Cavity-Assisted Detection of High-Q Silicon Nitride Nanomechanical String Resonators — •Run Fa Jonny Qiu, Anh Tuan Le, Avishek Chowdhury, and Eva Weig — Technical University of Munich, Chair of Nano- and Quantum Sensors, Hans-Piloty Str. 1, 87548 Munich, Germany

Amorphous, low-pressure chemical vapor deposition (LPCVD)-grown silicon nitride (Si3N4) is a highly pre-stressed material due to its thermal-coefficient mismatch and is exploited in our fabrication of doubly-clamped freely suspended nanomechanical string resonators with superjacent electrodes for dielectric drive and detection. High-quality factor (Q-factor) nanomechanical string resonators with a Q-factor of roughly 300000 were fabricated. Two large gold-coated antennas connected to the electrodes are deposited on-chip which permits for a direct coupling of the mechanical displacement-induced change of the capacitance between the electrodes to the electric field of the three-dimensional (3D) rectangular cavity. Research on the quarter-wave coaxial cavity together with a capacitive loop and disk coupling revealed the possibility of both coupling schemes for the detection of mechanical modes. Applying direct current (DC) voltage to the electrodes allows for a frequency tuning of the mechanical flexural modes in the opposite direction, which due to the inherent coupling of the two in-plane (ip) and out-of-plane (oop) modes leads to an avoided crossing.

Keywords: nanomechanics; microwave cavity; electromechanics