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KFM: Fachverband Kristalline Festkörper und deren Mikrostruktur
KFM 12: Diamond and Related Dielectric Materials II
KFM 12.5: Talk
Wednesday, March 20, 2024, 11:10–11:30, TC 010
Optimizations of Single-Crystal Diamond Surfaces for Implantation, Membranes and Nanophotonic Structures — •Lukas Wolfram, Julia Heupel, Johann Peter Reithmaier, and Cyril Popov — Institute of Nanostructure Technologies and Analytics (INA), University of Kassel, Heinrich-Plett-Str. 40, 34132 Kassel, Germany
Due to its exceptional physical and chemical characteristics, single-crystal diamond (SCD) is a promising material for the fabrication of high-quality photonic devices and for envisioned applications in quantum information technologies (QIT). The preparation of smooth and defect-free surfaces is important to yield optimal optical properties and reduce losses by e.g. scattering. Here, a solution to remove defects originating from polishing or etching procedures (e.g. grooves and pits) is presented, while avoiding the micro masking effect during the inductive coupled plasma reactive ion etching (ICP-RIE) process. Thereby, we achieved surface roughness down to 0.2 nm using optimized Ar/Cl2 etching recipes. The planarized diamonds are then used, as it will be shown in the talk, for structuring membranes (thickness between 5000-500 nm), nanophotonic devices or preparing implantation masks with hole sizes down to 40 nm.
Keywords: diamond; membranes; roughness reduction; nanophotonics