Berlin 2024 – wissenschaftliches Programm
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KFM: Fachverband Kristalline Festkörper und deren Mikrostruktur
KFM 2: High-resolution Lithography and 3D Patterning
KFM 2.1: Vortrag
Montag, 18. März 2024, 09:30–09:50, TC 010
Diffractive Microoptics in Porous Silicon Oxide — •Leander Siegle1, Dajie Xie2, Corey A. Richard2, Paul V. Braun2, and Harald Giessen1 — 14th Physics Institute, University of Stuttgart, Stuttgart, Germany — 2Beckman Institute for Advanced Science and Technology, University of Illinois Urbana-Champaign, Urbana, IL, USA
We demonstrate focusing as well as imaging using diffractive microoptics, manufactured by two-photon polymerization grayscale lithography (2GL) that has been written into porous silicon oxide. While typical doublet lens systems require support structures that hold the lenses in place, our optics are held by the porous media itself, decreasing both the fabrication time and design constraints. Compared to the typical two-photon polymerization fabrication process, 2GL offers better shape accuracy while simultaneously increasing throughput. To showcase 2GL fabricated optics in porous media, we fabricate singlet diffractive lenses with a diameter of 500 µm and numerical apertures of up to 0.6. We measure focusing efficiency and analyze the shape of the system with the 3D fluorescence signal of the photoresist. Furthermore, we design, print, and optimize a doublet lens system for imaging purposes with a thickness below 60 µm and examine the high-resolution imaging performance with a USAF 1951 resolution test chart.
Keywords: 3D Printing; Grayscale Lithography; Microoptics; Porous Silicon; Polymerization