Berlin 2024 – wissenschaftliches Programm
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MA: Fachverband Magnetismus
MA 20: Poster I
MA 20.38: Poster
Dienstag, 19. März 2024, 16:30–19:00, Poster A
The importance of adhesion layers for the growth of sputter deposited Co/Pt multilayer systems — •Rico Ehrler1, Tino Uhlig1, Felix Engelhardt1, Fabian Samad1, Peter Heinig1,2, and Olav Hellwig1,2,3 — 1Chemnitz University of Technology, D-09107 Chemnitz, Germany — 2Helmholtz-Zentrum Dresden-Rossendorf, D-01328 Dresden, Germany — 3Research Center MAIN, D-09126 Chemnitz, Germany
Historically, many studies explored properties of sputter-deposited Co/Pt multilayer (ML) with diverse seed layers and substrates. To improve adhesion, later studies added a thin adhesion layer between oxide substrates and metal seeds, significantly affecting the ML system's structure and magnetics as well.
In our investigation, we employed x-ray reflectivity (XRR), x-ray diffraction (XRD), and atomic force microscopy (AFM) to examine the role of Ta adhesion layers on the structure of a Co/Pt ML system grown on thermally oxidized Si for various sputter deposition pressures. Additionally, we reevaluated the impact of seed layer thickness when using this adhesion layer. Magnetic properties were characterized using SQUID-VSM hysteresis loops and magnetic force microscopy (MFM) images. We found that pressure-dependent structural changes were less pronounced with the Ta adhesion layer, enhancing saturation magnetization and anisotropy, particularly at higher pressures. In contrast, Pt seed layer thickness variations produced minor changes in the ML system's magnetic behavior, differing from older studies without an adhesion layer.
Keywords: Co/Pt multilayer; Adhesion layer; Sputter deposition; Perpendicular magnetic anisotropy; X-ray reflectivity