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MM: Fachverband Metall- und Materialphysik

MM 29: Poster II

MM 29.3: Poster

Tuesday, March 19, 2024, 17:00–19:00, Poster B

Precise anisotropic thermal property measurement for AlAs/GaAs superlattice using Beam-Offset Frequency-Domain Thermoreflectance (BO-FDTR) technique — •ANKUR CHATTERJEE1,2, D Dziczek1, M Pawlak1, and A Wieck21Institute of Physics, Nicolaus Copernicus University, Torun,Poland — 2Chair of Applied Solid-State Physics, Ruhr-University Bochum

This description underscores the significance of effectively managing thermal conditions in high-performance semiconductor superlattice devices, specifically AlAs/GaAs superlattice with a period thickness of 52nm and a 50 nm Gold (Au) transducer on top. The focus of this work is on a detailed in-plane and cross-plane examination of thermal parameters, including thermal conductivity, thermal diffusivity, and thermal boundary resistance, within both single and multi-layered structures. This method utilizes rotating stages to precisely control the spatial separation (beam-offset3) between the pump-probe beam for in-plane thermoreflectance measurements. This non-contact pump-probe technique is purposefully crafted to measure thermal properties, encompassing cross-plane aspects3, across a broad frequency spectrum scanning from 10 Hz to 1.25 MHz. We found that measurements can be very precisely around 1-2% with expanded uncertainty (95% Confidence interval) whereas the standard error is 6-7% which is better compared to the previous work.

Keywords: Thermoreflectance; Beam offset; thermal conductivity; thermal diffusivity; deep learning

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