Berlin 2024 – wissenschaftliches Programm

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O: Fachverband Oberflächenphysik

O 29: Poster: 2D Materials

O 29.1: Poster

Dienstag, 19. März 2024, 12:30–14:30, Poster A

Precision in Growth: Knudsen Cells and Solution-Coated Precursors Revolutionize TMDC Synthesis by CVD — •Thomas Aquinas Pobi, Osamah Kharsah, Jonah von Kuczkowski, and Marika Schleberger — Universität Duisburg-Essen, Fakultät für Physik und CENIDE, Duisburg,Germany

Chemical Vapor Deposition (CVD) stands out as a reliable technique for synthesizing transition metal dichalcogenides (TMDCs) like MoS2 and WS2 . However, the process’s susceptibility to minor variations in growth parameters often hampers reproducibility. This study introduces a novel approach utilizing a combination of Knudsen cells and a solution-based, spin-coated precursor to address this challenge. By ensuring a constant and sustainable chalcone supply, this method not only overcomes reproducibility issues but also enhances the spatial distribution of the precursor. The results demonstrate a successful transition from diffusion-limited growth to attachment-limited growth, marking a significant advancement in TMDC synthesis.

Keywords: Chemical Vapor Deposition; Knudsen cells; TMDC